SEMICON West 2017: New Deionized Water Vapor Delivery Module from Brooks Instrument

SEMICON West 2017: New Deionized Water Vapor Delivery Module from Brooks Instrument

Wednesday, Jun 28, 2017

Company to exhibit the industry’s most accurate and reproducible deionized water vapor delivery module, along with its GF100 Series Mass Flow Controller with EtherCAT® to improve semiconductor process yields

HATFIELD, Pa.  Brooks Instrument will be exhibiting at SEMICON West 2017 with a new vaporization product, mass flow controllers with high-speed EtherCAT®, and a broad range of other mass flow meters, controllers and capacitance manometers for semiconductor manufacturing. The company will be located in the West Hall at booth 7723.

With more than 70 years of history in new technology developments, Brooks Instrument is focused on improving the precision and performance of mass flow, pressure and vacuum technologies to help enable advanced semiconductor manufacturing.

A world leader in advanced flow, pressure, vacuum and vapor delivery solutions, Brooks Instrument will showcase key components in its portfolio designed to meet critical gas chemistry control challenges and improve process yields for 10nm and beyond nodes. This includes the new VDM300 vapor delivery module (VDM) as well as the company’s proven GF100 Series mass flow controllers (MFC) with high-speed EtherCAT® connectivity.

VDM300 Vapor Delivery Module: The self-contained VDM delivers precise amounts of ultra-high-purity deionized water (DIW) vapor to help ensure accurate and repeatable processing for functions such as plasma etching and photoresist stripping. Using proven vapor-draw vaporization technology and reliable component designs from previous Brooks Instrument vaporizers, the VDM300 features an improved graphical user interface and firmware.

Full-scale flow capacity is up to 3,000 standard cubic centimeters per minute (sccm), with a better control turndown ratio of 20:1. Flow accuracy is ±1.0 percent of set point at 10-100 percent full-scale, while repeatability is less than ±0.2 percent of full-scale. In addition, the flow rate is independent of DIW inlet pressure fluctuations.

With its optional EtherCAT interface, the VDM300 joins the Brooks Instrument line of EtherCAT-enabled products, which also includes the company’s proven GF100 Series MFCs. The VDM300 uses the same signal processing and calibration techniques as the GF100 Series.

GF100 Series MFC with High-Speed EtherCAT Connectivity: Brooks Instrument has enhanced its industry-leading GF100 Series MFCs with high-speed EtherCAT interfaces for both high-flow and low-flow applications.

Responding to rapidly evolving requirements for next-generation tools and fabs, the GF100 Series includes several features to help boost process yields and productivity:

  • Embedded diagnostics to leverage real-time EtherCAT data acquisition capabilities for advanced fault detection and classification;
  • An ultra-stable flow sensor (less than ±0.15 percent of full-scale drift per year) enables tighter low set point accuracy and reduces maintenance requirements;
  • Improved valve shutdown reduces valve leak-by, minimizing potential first wafer effects;
  • Enhancements to the GF100 advanced pressure transient insensitivity to less than one percent of set point with five PSI per second pressure perturbations, which reduces crosstalk sensitivity for consistent mass flow delivery.

For more information about the complete range of Brooks Instrument products and solutions for semiconductor applications, visit www.brooksinstrument.com.

EtherCAT® is a registered trademark and licensed by Beckhoff Automation GmbH

About Brooks Instrument:

Since 1946 Brooks Instrument has been a leader in precision fluid measurement and control technology. Providing instrumentation for flow, pressure and vaporization, the company serves customers in semiconductor manufacturing, fiber optic and thin film manufacturing, solar cell, LED, alternative energy, oil and gas refining; chemical and petrochemical research; and pharmaceutical and biopharmaceuticals.

With manufacturing, sales, and service locations in the Americas, Europe, and Asia, Brooks Instrument has the world’s largest installed base of mass flow controllers. Its broad family of products includes legacy brands such as UNIT Instruments, Tylan, Key Instruments, and Celerity.

For more information, please visit www.BrooksInstrument.com. The company is also on LinkedIn (www.linkedin.com/company/Brooks-Instrument) and YouTube (www.youtube.com/user/Brooks407).