Non-Contact, High-Throughput Metrology to Control Mold Layer Thickness

Non-Contact, High-Throughput Metrology to Control Mold Layer Thickness

Wednesday, Jul 26, 2017

Foster City, CA - Quantum Analytics, a value-added distributor of multi-vendor analytical instrumentation, will be hosting a webinar titled, “Non-Contact, High-Throughput Metrology to Control Mold Layer Thickness”. The live webinar is free to attend, and will take place on August 17th at 10:00 am PST (12:00 pm CST).

This webinar focuses on the challenging task of measuring epoxy mold compound (EMC) thickness distribution across the wafer. An optical sensor based on spectral coherence interferometry (SCI) can be utilized to collect critical measurements related to mold thickness, uniformity and height information between bumps and the mold surface.

This is particularly demanding due to the high inhomogeneity and variation of the surface structure which makes it particularly difficult to analyze. The mold material creates many challenges for the process control loop due to its low reflectivity and strong internal scattering. Conventional optical thickness metrology methods fail to deliver data.

This webinar is a great opportunity to learn about SCI – an optical, non-destructive, high-throughput solution to measure mold thickness and surface warpage simultaneously. This is done by utilizing a sensor with high numerical aperture (NA) which allows for measuring layers and surfaces of mold materials, despite the usual measurement constraints. By adding a bottom sensor in twin-configuration, further simultaneous data collection is possible: total silicon (or glass) wafer thickness, as well as total thickness variation (TTV) in order to determine the redistribution layer (RDL) thickness.

Registration for the webinar is now open. Members of the SEMI Community and others are encouraged to register: www.LQA.com/mold-layer-thickness-metrology/

About Quantum Analytics

Quantum Analytics, a Black Forest Ventures Company, is a value-added distributor for analytical instrumentation, offering an array of customized financing solutions, technical services, cross-platform system integration, installation, training and product support. Quantum Analytics offers a number of solutions for the semiconductor industry, from high throughput wafer metrology to real time gas analysis. Visit www.LQA.com for more information.

Media Inquires

Lauren Armstrong
Marketing Director, Quantum Analytics
LArmstrong@LQA.com