James A. O’Neill, Ph.D.
Chief Technology Officer
Dr. O’Neill joined Entegris in 2014 as part of the ATMI acquisition. He currently serves as the Chief Technology Officer for both the Electronic Materials and Critical Materials Handling businesses.
He joined ATMI in 2012 as Senior Vice President responsible for the Electronic Materials Business. This included product technology responsibilities for critical wafer process steps such as deposition, surface cleaning and copper plating. In this capacity, he oversaw technology and product development, marketing strategy and new product introduction.
Prior to joining ATMI, Dr. O’Neill was director of 14nm technology development at IBM where he led process development activities at both Albany Nanotech and East Fishkill facilities. With over 23 years of experience in research, development and manufacturing operations for the semiconductor industry, Dr. O’Neill now leads global development efforts in new material solutions for the industry’s most challenging issues.
Dr. O’Neill earned a Ph.D. in physical chemistry at Columbia University and a Bachelor’s degree in chemistry from Yale University.