Korean Translation of Equipment Data Acquisition (EDA) Standards

Korean Translation of Equipment Data Acquisition (EDA) Standards

By Natalie Shim, SEMI Korea

SEMI and the Korea Semiconductor Industry Association have agreed to collaborate on the translation of standards developed by the global SEMI Information & Control Committee, and will focus on Equipment Data Acquisition (EDA) interface standards. This collaborative effort follows the translation of nine SECS/GEM standards with the support of KSIA in August 2013.

The software standards translation project was initially encouraged by Korea's chapter of the Information & Communication (I&C) Committee. As an extension of the original project, Korea members of the I&C Committee selected the following EDA standards:

  • E120 Specification for the Common Equipment Model (CEM)
  • E125 Specification for Equipment Self-Description (EqSD)
  • E132 Specification for Equipment Client Authentication and Authorization
  • E134 Specification for Data Collection Management

EDA Standards are a collection of SEMI standards intended to facilitate and improve communication between a factory’s data gathering software applications and the factory equipment. The factory uses EDA to collect specific data from equipment, and then analyze that data to determine how best to increase productivity improve quality, and reduce costs.

“While EDA is currently not as popular as GEM300 or SECS/GEM, there’s a high potential to be widely implemented if the industry is required to handle massive data,” said Hyungsu Kim, the EDA Task Force leader. He also emphasized the importance of having the documents in the local language, as they will allow local engineers to study them thoroughly on their own.

SEMI, Standards Watch - June 2014