Facilities & Gases Standards Meeting Schedule for NA Spring 2014

Facilities & Gases Standards Meeting Schedule for NA Spring 2014

Monday, March 31, 2014

 

08:00-09:30

Materials of Construction of Gas Delivery Systems TF

 Agenda

09:30-11:00

Filters & Purifiers TF

 Agenda

10:00-12:00

F51 Revision TF

 Agenda

11:00-12:00 

Mass Flow TF

 Agenda

13:00-14:00

Gas Specifications TF

 Agenda

14:00-15:00 Surface Mount Sandwich Component Dimensions TF

 Agenda

15:00-17:00

BIM for Semiconductor Capital Equipment TF

 Agenda

 

 

 

Tuesday, April 1, 2014

09:00-12:00

Facilities & Gases Committees

 Agenda