Tosoh Invests in PVD Expansion to Serve the 450mm Wafer Semiconductor Market

Tosoh SMD, Inc., Ups the Ante with Major Investment in Manufacturing and R&D Equipment and Facilities to Serve the Nascent 450 mm Wafer Semiconductor Market

TOKYO, Japan — October 31, 2013   Tosoh Corporation is pleased to announce that Tosoh Group company Tosoh SMD, Inc., will implement a major expansion at its Grove City, Ohio, operations to develop, produce, and support physical vapor deposition (PVD) sputtering targets for the new 450mm wafer semiconductor market. The expansion is the biggest investment in Tosoh SMD’s history and is meant to position the company for the next generation products and technologies. It will include facilities, novel equipment and tools for manufacturing, and a sputter deposition tool for R&D and evaluation purposes. Work is underway and the first stage is slated to be ready by December 2014. 

According to Philip Frausto, Tosoh SMD’s director of global marketing and sales, “Through this new investment, we ensure that Tosoh will have sufficient capacity to deliver production-ready 450mm targets to customers and OEMs and confirm our commitment to develop new PVD sputtering target materials.”

Martin Blazic, Tosoh SMD’s president and COO, states, “Tosoh SMD, Inc, is a recognized leader with a 37-year history of innovation delivering PVD sputtering target solutions for Semiconductor OEMs and customers. This investment is a confirmation of our responsibility towards our global customers.  We shall continue to support our customers through the development of innovative materials and sputtering targets for the new 450mm market.” 


Tosoh SMD, Inc., is headquartered in Grove City, Ohio and has additional facilities in Taiwan, Korea, and China. This Tosoh Group subsidiary is a leading provider of thin film deposition materials and of solutions to manufacturers in the semiconductor, display, solar, and large-area coating markets. It is backed by the multi-billion dollar Tosoh group and part of its Advanced Material Division. Other offerings of the division include Silica Glass, CVD materials, Zeolite, Zirconia ceramics and Manganese Dioxide. For more information, visit

For more information, please contact:

Phil Frausto
Director of Global Marketing and Sales
Tosoh SMD, Inc.
Tel: +614-277-4159