SMC 2013 Abstract- Alissa Fitzgerald, A.M. Fitzgerald and Associates

Developments in MEMS Manufacturing Technology

Alissa Fitzgerald
Founder and Managing Member
A. M. Fitzgerald & Associates

The field of MEMS can be viewed as a broad collection of manufacturing technologies, used to make a wide variety of micro-scale 3D shapes and devices. Sensors, actuators, and passive structures are typical embodiments. MEMS process engineers, always on the hunt for more innovative or reliable ways to make their structures, are quick to absorb, adapt and deploy novel methods and materials to suit their needs. This talk will present some of the materials and methods that have recently emerged and how they are being utilized in MEMS manufacturing.  Some of these technologies will have crossover potential to IC manufacturing.