New SEMI Standards Task Force to Develop Ultrapure Water Standard

New SEMI Standards Task Force to Develop Ultrapure Water Standard

Goal: Mitigate the Risk of Contamination from Ion Exchange Resins Used in Advanced Semiconductor Manufacturing

By Slava Libman (Air Liquide, Balazs NanoAnalysis), David Blackford (Fluid Measurement Technologies), Marty Burkhart (HiPureTech), and Michael Tran (SEMI)

Advanced semiconductor manufacturing is becoming ever more susceptible to particulate and organic contamination. Ultrapure water (UPW) piping and piping components undergo rigorous cleanliness testing using the SEMI F57, SEMI F104, and SEMI C79 standards. UPW Ion Exchange (IX) resin is the only major UPW material that has no cleanliness standard available. IX resin used in UPW polish loops represents a similar source of contamination and has a comparable surface area to UPW piping materials. IX resin is thought to produce significant amounts of particulate and organic material and yet is not tested for its contribution to UPW contamination. Since resin suppliers prepare IX resin in different ways, the absence of standardized testing and quality requirements poses an unacceptable risk to final UPW quality.

In order to address the gap of standardized testing and quality requirements, the UPW International Technology Roadmap for Semiconductors (ITRS) team together with the SEMI Standards Liquid Chemicals Committee formed the Resin IX Task Force at SEMICON West 2013. The Task Force includes representatives from all major high-purity IX resin suppliers, as well as semiconductor facility end users, analytical experts, and UPW process experts. The Task Force was created to develop a new standardized methodology to measure IX resin quality and its effect on the final UPW quality. The SEMI Liquid Chemicals Committee expects that, once the standard is developed, improvements will be made to the resin manufacturing processes. Providing higher purity resin products will mitigate the risks to semiconductor manufacturing and lead to better yields and device reliability.  

Within its scope, the task force will determine appropriate parameters for the quality measurement and available analytical techniques associated with those parameters. Based upon its findings, the task force will select the most effective method for measuring IX resin quality. Results of the experimental work will determine the final testing procedure that the SEMI Liquid Chemical Committee submits for industry ballot. If the standard is found acceptable to the stakeholders, it will be published in 2014.

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October 1, 2013