Webinar: Trace Ionic Contamination Monitoring in Semiconductor & Electronics Fabrication

Semiconductor Webinar Series

Recorded Webinar: Trace Ionic Contamination Monitoring in Semiconductor & Electronics Fabrication

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Recorded Tuesday Oct 8, 2013.

Sponsored by:

View this informative webinar sponsored by Thermo Fisher Scientific. 

High-tech organizations that manufacture semiconductors and electronic products are extremely concerned about contaminants in ultrapure water (UPW) undermining process yield. The required UPW quality exceeds the ability of on-line resistivity measurement to indicate presence of the trace level of impurities, and thus more sensitive lab analysis is required. Another area of concern is acids and bases in air—airborne molecular contamination (AMC)—that requires clean sampling and subsequent low-level analytical testing. High-purity materials may also leach impurities into the process and affect semiconductor manufacturing, especially during the critical period of new system start-up.

Ion chromatography (IC) allows an analyst to determine ionic contamination in UPW, clean-room air, and solid materials. Contamination may come from inorganic anions (such as fluoride, chloride, nitrite, nitrate, and sulfate) or from organic anions (such as acetate, formate, and others). Contamination may also come from positively charged inorganic cations (sodium, ammonium, calcium and magnesium) or from organic compounds, such as amines.

This webinar will first give a brief introduction to the IC analytical method and then focus on how Balazs NanoAnalysis uses IC to deliver the accurate determination of parts per billion (ppb, ug/L) or even parts per trillion (ppt, ng/L) of ionic contaminants for chemistries and materials used in semiconductor and electronic manufacturing processes.


Speakers


Bob Joyce
Global Market Development Manager
Industrial Chromatography
Thermo Fisher Scientific

Bob Joyce has a long history in the development of analytical methods for trace and ultratrace determination of contaminants in water, air, and materials. He was involved with trace analysis with Mobile Oil, Beckman Instruments, and the Dohrmann Division of Envirotech. Following this, he managed the market development for semiconductor, power, and environmental markets for Dionex Corp., now Thermo Fisher Scientific Inc.

Bob is a long-standing member of the ASTM Committee D19 on water and has received the coveted Max Hecth Award for Excellence. He is currently the D19 Subcommittee Chairman for Organics in Water. Bob graduated from Loyola University Los Angeles with a degree in Chemistry.

Kirk Chassaniol
Manager, Product Applications
NA Ion Chromatography Sales Support
Thermo Fisher Scientific

Kirk Chassaniol is currently manager of ion chromatography (IC) sales support within the North American Center of Excellence. For 22 years he has been involved in the field of IC in various responsibilities at Dionex Corp. and now Thermo Fisher Scientific, including southwest regional technical specialist and chemical/petrochemical market development manager. He has a BS in Chemistry from St. Louis University.

 

Vyacheslav (Slava) Libman
Lab Director
Advanced Water Analysis
Air Liquide—Balazs Nanoanalysis

Dr. Libman has over 18 years of experience in water technology in industrial applications. He earned his Ph.D. and M.S. in Environmental Engineering from the Technion, Israel Institute of Technology (Haifa, Israel). Dr. Libman’s contributions include more than 40 publications in the area of water technology as well as moderation of a number of UPW and other water conference sessions. Dr. Libman is a cochair of the International Technology Roadmap for Semiconductors (ITRS) and he also chairs task forces with Semiconductor Equipment and Materials International (SEMI), which leads development of high-purity water specifications for semiconductor and photovoltaic industries.