25th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC 2014)


ASMC celebrated 25 years of manufacturing excellence during the 2014 conference.  The SEMI Advanced Semiconductor Manufacturing Conference continues to fill a critical need in our industry. Conference co-chairs Israel Ne'eman, Applied Materials and Oliver Patterson, IBM Microelectronics, and industry professionals from around the globe participated in 3 days of networking, learning and knowledge-sharing on new and best-method semiconductor manufacturing practices and concepts. Beginning May 18, with a welcome reception, ASMC 2014 featured over 90 technical presentations, keynotes and tutorials and networking opportunities over the following days.  If you didn't attend the conference, here's what you missed!


2015 Call for Papers is now Closed!

For information on ASMC 2015 visit www.semi.org/asmc2015.

Corporate Sponsors:

3Way logo

Air Liquide



ASNA logo



CNW logo





Green Tweed logo



Metryx logo




NY loves nanotech logo


Sponsorship opportunities for this event are available.  To become a sponsor, contact Marlene Sibley at msibley@semi.org or 1.408.943.6988

Technical/Supporting Sponsors




Advanced Manufacturing for Foundry Business
Dr. John Lin (biography)
General Manager of Operations, VP, 
G450C (TSMC assignee)
Taiwan Semiconductor Manufacturing Company, Ltd. 
(sponsored by ASML) 

Innovation Pipeline for 10nm and Beyond
Dr. Mukesh V. Khare (biography)
Distinguished Engineer & Director, Semiconductor Technology Research
IBM Research@ Albany NanoTech
From Germanium, to Gallium Arsenide, to Silicon and back again: a Perspective on the Semiconductor Manufacturing Industry
Dean W. Freeman, Vice President, Research (biography)

Technical Sessions


• 3D/TSV
• Advanced Equipment and Materials
• Advanced Metrology
• Advanced Patterning/Design for Manufacturing
• Advanced Process Control (APC)
• Contamination Free Manufacturing (CFM)
• Data and Yield Management
• Defect Inspection
• Discrete Power Devices/Emerging Technologies
• Equipment Reliability and Productivity Enhancement
• Factory Optimization
• Yield Enhancement
• And the ever popular Interactive Poster/Reception

Panel Discussion


25 Years of Semiconductor Manufacturing: Accomplishments, Current Challenges, Future Directions - From the Internet to the Internet of Things

Moderator: Paul Werbaneth, Contributing Editor, 3D InCites
Dr. Lynn Fuller, Professor, Microelectronics Dept., Rochester Institute of Technology
Dave Gross, Director, Manufacturing Systems Technology, GLOBALFOUNDRIES
William Miller, Sr. Director of Engineering, Qualcomm
Robert Maire, President, Semiconductor Advisors LLC
Charlie Pappis, Group VP, General Manager, Applied Global Services, Applied Materials


Circuit Relevant Patterning with Directed Self Assembly: Overview and Outlook
Michael A. Guillorn, PhD, Research Staff Member, Manager Nanofabrication and Electron Beam Lithography (biography)
IBM T. J. Watson Research Center

Silicon Photonics
Dr. Haisheng Rong, Sr. Research Scientist (biography)
Intel Corporation

ASMC 2013 Entegris Best Paper Award:
Designing Product Workflow for Logistics – a Hidden Potential for Cycle Time and Cost Reduction as well as Quality Improvement in High-Tech-Factories     
Sophia Keil, Rainer Lasch, Dresden University of Technology; Dietrich Eberts, Infineon Technologies Dresden

ASMC 2013 GLOBALFOUNDRIES Student Best Paper Award:
Organizational Learning and Capital Productivity in Semiconductor Manufacturing 
Jiting Yang, Charles M. Weber, Portland State University  

Who Attends ASMC?

  • IC Manufacturers
  • Equipment Manufacturers
  • Materials Suppliers
  • Chief Technology Officers
  • Operations Managers
  • Process Engineers
  • Product Managers
  • Academia...

...from across the global semiconductor supply chain.  If you didn't attend ASMC 2013, learn what you missed!

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ASMC Committee

SEMI thanks the ASMC committee members, who volunteer countless hours in support of our annual conference.