Biography - Dr. Ben Rathsack, Tokyo Electron America

Ben Rathsack, Ph.D., Member of Technical Staff, Advanced Technical Group (ATG), Tokyo Electron America

Dr. Ben Rathsack is Member of Technical Staff working in the Advanced Technical Group (ATG) for the Semiconductor Production Equipment (SPE) Division at Tokyo Electron America.  His experience includes five years of lithography process and hardware development at TEL and six years of lithography development at Texas Instruments.  He has authored and coauthored around 30 publications.   He received his BS in chemical engineering from the University of Illinois/UC (1996) and his MS/PhD in chemical engineering under Prof. Grant Willson at the University of Texas/Austin (2001).