Eugenetech’s Single Type LPCVD Equipment for 450mm Wafer Provides Low Thermal Budget and Excellent Uniformity
SEOUL, Korea — January 4, 2012 — BlueJay™, Eugenetech’s Single Type 450mm LPCVD equipment is the first equipment selected last year for 450mm wafer process by G450C Consortium located at Albany, New York. BlueJay™ is used to make thin films such as Silicon Oxide, Silicon Nitride, and Poly Silicon.
The key issue when scaling down chip dimensions is how to meet tighter film uniformity and prevent impurities from out- diffusioning so that the chip cannot be degradated over time. BlueJay™ is the right solution for these issues.
Low Thermal Budget of BlueJay™ is the biggest advantage since its total process time is much shorter than that of batch type equipment.
Visit our website at www.eugenetech.co.kr for additional information.
About EUGENE Technology
Eugenetech is a Korean company listed on Kosdaq. Eugenetech supplies single type wafer process equipments such as single type LPCVD equipment, Plasma treatment equipment and Cyclic CVD equipment.
Tel: 82-31-330-3835/ 82-10-3499-8616
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