Update on SEMI E10 and the Future of SEMI Equipment Performance and Productivity Standards

Update on SEMI E10 and the Future of SEMI Equipment Performance and Productivity Standards

By Michael Tran, SEMI Standards

A major new revision of SEMI E10: Specification for Definition and Measurement of Equipment Reliability, Availability, and Maintainability (RAM) and Utilization was published in March 2012. SEMI North America (NA) Metrics Technical Committee members David Busing of KLA-Tencor and Michael Werre of Intel led the SEMI E10 Revision Task Force dedicated to the complete technical revision of SEMI E10. The goal of this task force was to have SEMI E10 provide a set of unified RAM metrics for individual equipment modules, non-cluster tools, single-path cluster tools, intended process sets (IPS), and multi-path cluster tools.  This revision includes the first official set of RAM metrics for IPS and multipath cluster tools. The other goal of this Task Force was to clarify, align, and reconcile the terms and methodologies beginning with SEMI E10 and across several SEMI Standards related to equipment performance and productivity in the future including:

  • SEMI E35-0312: Guide to Calculate Cost of Ownership (COO) Metrics for Semiconductor Manufacturing Equipment
  • SEMI E58-0703: Automated Reliability, Availability, and Maintainability Standard (ARAMS): Concepts, Behavior, and Services
  • SEMI E79-1106: Specification for Definition and Measurement of Equipment Productivity
  • SEMI E116-0707E: Specification for Equipment Performance Tracking
  • SEMI E124-1107: Guide for Definition and Calculation of Overall Factory Efficiency (OFE) and Other Associated Factory-Level Productivity Metrics

After SEMI E10 was published in March 2012, the SEMI E10 Revision Task Force was disbanded and its members along with members from the Equipment Productivity Metrics Task Force consolidated into the newly formed Equipment RAMP (Reliability, Availability, Maintainability, and Productivity) Metrics Task Force in Fall 2011. Rather than create a specific task force dedicated to a specific Standard like SEMI E10 before, the Equipment RAMP Task Force will be primarily covering both SEMI Standards E10 and E79. Like the SEMI E10 Revision Task Force, the Equipment RAMP Task Force objectives are to provide a unified and consistent set of equipment performance metrics with technical clarifications, alignment of terms, and reconciliation across various equipment performance and productivity Standards.

Currently, the Equipment RAMP Task Force has ongoing activities for SEMI E10, E58, and E79. For SEMI E10, the task force will continue to further refine the Standard by adding more technical clarifications after receiving industry feedback and will include a more extensive example with calculations for the application of SEMI E10 for modules, IPS, and multi-path tools. For SEMI E58, this task force will provide inputs and collaborate on the revision strategy for E58 with the SEMI Standards NA Information and Control Technical Committee, which is its primary owner. For SEMI E79, this task force will be revising this Standard for industry relevance with technical clarifications and alignment of the terminologies and methodology for consistency with SEMI E10. This will also take care of the five-year review of SEMI E79 last published in November 2006.

Participation in SEMI Standards

If you have any questions regarding SEMI Standards participation or would like to join the Metrics Technical Committee or the Equipment RAMP Task Force, please contact Michael Tran at mtran@semi.org.

The SEMI Standards Membership Application Form is available at: www.semi.org/standardsmembership.

SEMI Standards Watch, July 2012