Micropatterning Committee

Charter
To explore, evaluate and formulate consensus-based microlithography specifications that through voluntary compliance will enhance the manufacturing capability of the semiconductor industry.

For more information, contact SEMI Standards at standards@semi.org.

Micropatterning Committee Activities

Upcoming SEMI Standards meetings:

• July 10, 2013. SEMICON West Standards Meetings
  San Francisco, CA
• View SEMI Standards Calendar of Events

Interested in Participating?

SEMI Standards Program Membership is required to participate. Registration is free and quick. Join Now!

SEMI Micropatterning Standards

Search published Micropatterning standards (click on the 'Microlithography' volume)

Quick Links:

• Document Status Report
• New Activity Report Forms (SNARFs) and Task Force Organization Forms (TFOFs)
• Committee Meeting Minutes
• Committee Express Reports

Balloting Information:

• Critical Dates for Ballots – Submission Deadlines and Voting Period
• Vote on Ballots

Contact Us:

• SEMI Staff Contacts