Liquid Chemicals Committee

SEMI Standards LogoLiquid Chemicals Committee

To identify and develop international standards fulfilling the technical needs of the industry for liquid chemicals and liquid chemical distribution. Liquid Chemicals Committee standardization includes 1) analytical methods for evaluating liquid chemicals and materials used to contain and transport them, 2) specifications for liquid chemicals, and the materials used to transport them, 3) contamination related issues and analytical methods, 4) performance specifications for liquid chemical distribution systems and components, 5) physical interface specifications for sub-systems and components, and 6) guides for definition, use, handling and installation.

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Liquid Chemicals Committee Activities

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SEMI Liquid Chemicals Standards

Search published Liquid Chemicals Standards (click on the 'Process Chemicals' and 'Facilities' volumes)