Global FPD Metrology Committee

Charter:
To develop technical standard specifications and guides related to photomask for FPD manufacturing.

Scope:
1) Develop specifications/guides for photomask for FPD manufacturing.
2) Develop specifications/guides for equipment, components and materials to manufacture the photomask mentioned in item 1).
3) Specify equipment and materials used for test and inspection in the specification and for quality control of the photomask mentioned in item 1).

For more information, contact SEMI Standards at standards@semi.org.

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SEMI FPD Metrology Standards

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