Global Facilities Committee

To identify and develop international standards fulfilling the technical needs of the industry for facilities services, equipment and equipment installation. Facilities services typically include equipment installation, power, water, exhaust and support systems. Facilities Committee standardization includes: 1) analytical methods for evaluating facilities services and distribution equipment, 2) material specifications for facilities components, 3) performance specifications for facilities services and equipment, 4) physical interface specifications for equipment installation and distribution equipment, and 5) guides for definitions, use handling and installation.

For more information, contact SEMI Standards at standards@semi.org.

Global Facilities Committee Activities

Upcoming SEMI Standards meetings:

• July 8-9, 2013. SEMICON West Standards Meetings
  San Francisco, CA
• View SEMI Standards Calendar of Events

Interested in Participating?

SEMI Standards Program Membership is required to participate. Registration is free and quick. Join Now!

Published SEMI Facilities Standards:

Search published SEMI Facilities Standards

Quick Links:

• New Task Forces and Activities
• Document Status Report
• New Activity Report Forms (SNARFs) and Task Force Organization Forms (TFOFs)
• Committee Meeting Minutes
• Committee Express Reports

Balloting Information:

• Critical Dates for Ballots – Submission Deadlines and Voting Period
• Vote on Ballots
• How to Vote on SEMI Standards Ballots

Contact Us:

• SEMI Staff Contacts