SEMI Photovoltaic Chemicals Standardization Update

SEMI Photovoltaic Chemicals Standardization Update

By Kevin Nguyen, SEMI Standards and Marty Burkhart, Hi Pure Tech

Photovoltaic (PV) Gases and Liquid Chemical Purity Standards Task Force members met during the SEMI’s October Fall Standards Meetings in San Jose, California where they were able to advance two more balloted documents through the PV Materials Committee. Those were:

  • Doc. 5157A Specifications for Sulfuric Acid, Used In Photovoltaic Applications
  • Doc. 5095A Specifications for 2-Propanol, Used In Photovoltaic Applications

Additionally, the following documents, which were adjudicated during the July 2011 Intersolar America, have been published:

  • SEMI PV20-1011 Specifications for Hydrochloric Acid, Used in Photovoltaic Applications
  • SEMI PV21-1011 Guide for Silane (SiH4), Used in Photovoltaic Applications
  • SEMI PV26-1011 Guide for Hydrogen Selenide (H2Se) in Cylinders, Used in Photovoltaic Applications
  • SEMI PV27-1011 Specifications for Ammonium Hydroxide, Used in Photovoltaic Applications

Including the fourteen previously published PV chemical standards, a total of sixteen SEMI chemicals standards for PV manufacturing will be available later this year. The task force has the remaining three documents to ballot, which are currently being worked during our monthly phone calls:

  • Doc. 5156 Specifications for Hydrogen Peroxide, Used In Photovoltaic Applications
  • Doc. 5241 Specifications for Potassium Hydroxide (KOH), 45% Solution, Used In Photovoltaic Applications
  • Doc 5242 Specifications for Fluorine (F2), Used In Photovoltaic Applications

The task force also reviewed and determined that standards for Carbon Tetrafluoride, Diborane,  Helium, Nitrogen Trifluoride (NF3), Phosphine, and Sulfur Hexafluoride are not necessary.  These chemicals standards are already existed in semiconductor application and they can be used for PV manufacturing.  Visit the publication download page for Gases and Process Chemicals volumes for more information.

If you have any questions about participation or would like to join our task force please contact either Kevin Nguyen at, Suhas Ketkar at, Tom Hackett at or Marty Burkhart at

For more information on PV Standards activities at SEMI or upcoming meetings, please visit: or

SEMI Standards Watch, December 2011