Semiconductor Components, Instruments, and Subsystems (SCIS)

Semiconductor Components, Instruments, and Subsystems Special Interest Group

The Semiconductor Components, Instruments, and Subsystems (SCIS) Special Interest Group represents companies that produce, package and/or distribute any of the following used in semiconductor or related industries:

  • Components such as seals, filters, mass flow controllers, valves, sensors, ion beam sources, etc.

  • Instruments for in-line and off-line data measurement, collection, and monitoring

  • Sub-systems that support process tools e.g. vacuum, robotics, power conversion, abatement, chillers, etc.

Focus: Establishing a baseline for measuring defects introduced by process-critical components

  • Particle or defect limits will not be defined, but will focus on defining consistent methodologies for measuring defects

Featured Articles

 

Featured Events

Jul 10-12, 2018
Sep 24-26, 2018

 

Upcoming Face-to-Face Meeting

July 11, 2018
8 AM to 1 PM PST
San Francisco, CA
In conjunction with SEMICON West 2018

 

About SCIS

Interested in becoming a SCIS SIG Member?

Contact Paul Trio for more information at: ptrio@semi.org