To sustain the global competitiveness of Taiwan semiconductor industry and to cope with the new challenges in the coming era of 18” (450mm) wafer production and 14-nanometer manufacturing process, there is an imminent need to enhance the efficiency of design and construction of fabrication plants (fab) and to essure high quality of the production environment in Taiwan.
Meanwhile, because of the extremely controlled environment needed for wafer production, semicondunctor fab consumes a lot of energy and generates carbon dioxide that affects global warming and ecosystems. How to optimize the energy consumption and how to minimize the carbon dioxide through real-time intelligent monitoring have to be dealt with too.
The purpose of this proposal is to develop applied technologies needed for Intelligent Monitoring and Green Facility Information Modelling (IM Green FIM). It is expected that the developed intelligent technologies can be used to efficiently facilitate the biulding of high quality Taiwan semiconductor fab through the fab's life cycle of planning, design, construction, procurement, start-up. commisioning, operation, maintainance, and monitoring.