1. 'Spin Etcher Wet Master Series': provides automatic single wafer wet chemicalprocess for backside, frontside and wafer edge treatment. 2. Dry-Scrubber of CS-GmbH: a passive dry-bed chemisorption system through chemical reaction underambient temperature and pressure, the gas and catalytically-active chemisorbentswill form stable non-hazardous salts. 3. Dispersion Head Overhaul. 4. Other partscleaning.