MTK has released new wet cleaning Equipment with low cost & high performance. This Single spin type Equipment has Capability for 25nm made LSI. Customers can select configuration for 1~4 processor chambers and maximum 3 chemistry. Moreover, we are selling new type Ozone water & Ozone gas generator tool with low cost & small size. Ozone water is very clean without metal contamination by unique design. Ozone concentration is maximum 30ppm.