The EtherCAT Technology Group is the non profit international vendor and user association for the real time Ethernet system called EtherCAT. EtherCAT is a high performance fieldbus system, e.g. for motion control, I/O, sensors, which also supports controller to controller communication. There also is a full set of device profiles for semiconductor specific devices such as MFC, RF Generator, Vaccuum Gages, Pumps etc. Vertical integration via TCP/IP, SECS/GEM, EDA is supported; gateways for DeviceNet, Profibus, CANopen and other systems are also available.