Session 17: Substrates
Refinement of transparent conductive films on flexible glass by in-line flash lamp annealing
Thursday, February 15, 2018
10:40 AM - 11:00 AM
Ultra-thin flexible glass is currently one of the most interesting flexible substrate materials. It is thin, light, and can be manufactured in rolls. Despite of its fragility, with its superior surface quality, high transparency, perfect barrier properties, high thermal and dimensional stability, flexible glass opens up novel approaches in flexible electronics. We report about the status our research activities in sheet-to-sheet and the roll-to-roll coating of transparent conductive thin-films on flexible glass under pilot-scale conditions. The refinement of the optical and electrical properties of the TCO films were done by in-line flash lamp annealing (FLA). With FLA, TCO layers are flashed with highly energetic Xenon light in a time range of few milliseconds. This light is absorbed by the TCO layer. The use FLA in in-line mode allows a significant reduction of the process time compared to standard heating procedures like furnace annealing. This is an important progress for thin-film processing on flexible glass in high-volume manufacturing processes in sheet-to-sheet or roll-to-roll.
- More than fifteen years of experience in development of sputtering processes, thin-film technology and new materials for large-area applications.
- Doctor of Engineering in the Dept. of Mechanical Engineering Main Research Topics:
• Pilot scale vacuum coatings on non-flexible and flexible glass: upscaling of processes for large areas à up to Gen 4/5
• Development of sputtering processes for high and low rate deposition on large size substrates
• Magnetron sputtering: metal and reactive processes, in-line processes
• Thin-film material research and development, as well fabrication of functional layers and layer stacks:
Group Leader S2S Technologies & Coordinator Flexible Glass Activities
Fraunhofer Institute for Organic Electronics, Electron Beam and Plasma Technology FEP