By Jiwon Cho, SEMI Korea
Over 260 people attended the 2nd SEMI Strategic Materials Conference (SMC) on Thursday, May 18 at the COEX Exhibition Center in Seoul, Korea. In the “More than Moore” era, scaling is a persistent challenge that requires special attention to a wide range of issues. Cost effectiveness, performance, quality management and environmental issues were all featured at this year’s conference and a special focus was placed on the “Future of Materials.”
SMC Korea 2017 included a day-long technical conference with three sessions covering the market in China, new materials and collaboration. The three sessions showcased 14 technology experts from Korea, America, Asia and Europe and presented an excellent opportunity to learn about:
• Technology and Market Trends from the Perspective of a Material Supplier,
• Developments in China’s Semiconductor Materials Market,
• Advancements in Materials for everything from packaging to EUV, 3D NAND and DRAM, and
• Surface Preparation, Cleaning, and Avoiding Contamination
The conference opened with two keynote speakers, Dr. Hoyoung Kang from TEL, and James E. Lamb III from Brewer Science Inc. Kang addressed the material and scaling challenges related to patterning. He highlighted that 3D architecture and continued scaling would require advances in patterning technology and that the patterning paradigm has shifted to self-alignment and bottom-up approaches. He added that EPE (Edge Placement Error) is the fundamental scaling challenge.
James E. Lamb III presented on “Materials Proliferation to Meet Scaling Challenges and Quality Requirements for Manufacturing with Sub-10nm Patterning.” He said that multi‐patterning with self-aligned pitch doubling (SADP) and quadrupling (SAQP) have became the dominant method for meeting scaling challenges. The multipatterning is regarded as a reliable technique for extending 193i lithography but may hit a limit due to process complexity and cost.
The day concluded with a networking reception.
The Strategic Materials Conference Korea 2017 had table-top booths in the exhibit area with the sponsors including: BASF, Chemours, KCTech, Merck and Versum Materials.
SMC Korea 2017 was an ideal place to hear about critical topics in the manufacturing process and to connect with key players in the industry. Seung Jin Baek, director of Pall Korea said, “There was a wide variety of topics and contents. I could get the insight into the materials challenges and 3D NAND. I’m very satisfied with all presentation and networking opportunities provided by SEMI.”
May 30, 2017