Session 16: Encapsulation & Coating
Flexible Functional Devices at Mass Production Level with the FLEx R2R sALD Platform
Wednesday, June 21, 2017
5:00 PM - 5:20 PM
Atomic layer deposition has been around for quite some time. Only recently however, the link to mass production has been made, with the introduction of spatial atomic layer deposition (sALD), which allows for deposition rates in a range similar to established coating techniques like plasma enhanced chemical vapor deposition. Simultaneously, flexible devices have gained increased popularity due to a huge diversity of applications. For such devices and their market introduction, sALD offers a unique opportunity: it combines high quality materials, from protective to functional coatings or active layers, with competitive costs and high throughput. At Meyer Burger (Netherlands) B.V. we have paved the road to sALD mass production of flexible devices with the introduction of the FLEx R2R sALD platform.
Our equipment is designed as a fully modular platform, allowing for integration of a sALD coating step with pre-and-post sALD steps (eg. surface treatment and activation, planarization and protective layers) for the production of high quality flexible functional foils. The design of the R2R platform, which is the result of dedicated gas flow modeling and web transport simulations, allows for a significant throughput of over 40 m2/hour of 20 nm AlOx coating on foil and already takes into account the scalability to larger web widths (currently 600 mm). Extensive process testing proves that layer growth corresponds to pure ALD both in terms of growth per cycle and saturation curves, even at such a high throughput. Furthermore, layer thickness uniformity is excellent: over a width of 500 mm, deviations are less than 1%. A 20 nm AlOx moisture barrier deposited on 125 micron PET foil, without any additional surface treatment, has a water vapour transmission rate (WVTR) of 10-5g/m2/day at 20°C and 50% relative humidity, proving its high quality. A detailed introduction of the R2R platform and the performance of our functional foils as well as a brief discussion on the scalability will be presented.
Edward Clerkx is heading the business unit Thin Film Coating within Meyer Burger (Netherlands) B.V. He has a background in engineering and over 20 years of experience in industrializing process equipment. Since 5 years ago, he is active in the field of barrier and encapsulation equipment with a focus on the flexible electronics market.
Meyer Burger (Netherlands) B.V