By Ayo Kajopaiye, Collaborative Platforms, SEMI
SEMI CGMC Special Interest Group hosts a webinar on October 18 on "Patterning Challenges at 5nm"
Developed from one of the most successful Strategic Materials Conferences (SMC), the SEMI Chemical and Gas Manufacturers Group (CGMG) Special Interest Group will hold its last webinar of the year on October 18 on "Patterning Challenges at 5nm." With the process challenges at 5nm being discussed at SMC 2017, along with well-received presentations from companies such as ARM and Samsung, this webinar will focus on remaining challenges in EUV lithography and how materials developments might address those challenges. REGISTER NOW! The webinar is complimentary for SEMI members and $99 for non-members.
Greg McIntyre, director of Advanced Patterning at IMEC, and one of the speakers who will be presenting at the webinar says, “EUV lithography has steadily been gaining momentum in recent years and edges closer and closer to insertion in manufacturing. While considerable progress has been made and the first uses of EUV appear imminent, there remain some difficulties that will challenge the rate and degree to which EUV can be employed.” Greg’s presentation will focus on the patterning challenges that remain and what efforts are being made to address these challenges. The webinar will also feature a presentation from Mark Slezak, director of Technology and executive VP at JSR Micro, who will give a materials perspective of the challenges that patterning at 5nm present.
The CGMG has sponsored a series of webinars throughout the year that focus on specific topics important to the materials industry. The first webinar was held in April and reviewed advancements in advanced logic devices and the device evolution that would potentially implemented to maintain scaling. The second webinar that took place in June focused on different government regulations from around the world and how they affected materials development and manufacturing in the semiconductor industry. The CGMG will continue the webinar series next year with more relevant topics related to the industry.
For more information on past CGMG webinars and to view the presentations, SEMI members can click here and look under the Materials section.
Click here to register for the October 18th webinar "Patterning Challenges at 5nm"
The CGMG is a special interest group of SEMI made up of members who produce, package and/or distribute materials used in micro-electronics applications. To learn more about CGMG and to stay up to date on future webinars, click here for more information.
October 10, 2017