ASMC 2018 Tutorial: Big Data Analytics and the Smart Factory in Microelectronics Manufacturing
James Moyne is a Consultant for Standards and Technology for the Applied Global Services group at Applied Materials. He received his Ph.D. degree from the University of Michigan, where he is currently an Associate Research Scientist in the Department of Mechanical Engineering. Dr. Moyne has experience in advanced process control, prediction technology (predictive maintenance, virtual metrology, and yield prediction), and big data technology, focusing on analytics; he is the author of a number of refereed publications in each of these areas. He holds a number of patents on prediction and software control technologies, is co-author of Run-to-run Control in Semiconductor Manufacturing, and has co-authored SEMI standards in the areas of process control (including E133 and E126), sensor bus (E54), and big data (E148-Time Synchronization and E160-Data Quality). James is currently co-chair of the Factory Integration Thrust of the International Roadmap for Devices and Systems (IRDS), and co-chair of the North America SEMI Information and Control Committee, and SEMI process control systems and sensor bus standards efforts.