26th SEMI Advanced Semiconductor Manufacturing Conference (ASMC 2015)

ASMC Header
Thank you to all ASMC 2015 speakers, sponsors and attendees!  We had an excellent conference, with outstanding presentations and record numbers!  For a good conference overview, please read this review in 3D InCites.  Information regarding ASMC 2016 will be posted in the coming weeks.

For over 25 years, ASMC has been a leading international technical conference for exploring solutions to improve the collective microelectronics manufacturing expertise. Solving the challenges presented by semiconductor manufacturing is an ongoing collaborative effort by users, device makers, equipment and materials suppliers and academia. ASMC provides an unparalleled platform for semiconductor professionals to network and learn the latest information in the practical application of advanced manufacturing strategies and methodologies. ASMC 2015 will feature keynotes, tutorials, technical sessions and a panel discussion which touch on the opportunites and challenges in semiconductor manufacturing.  From Fab Optimization to Yield Enhancement, and Enabling Technologies to Advanced Equipment and Materials Processes, ASMC touches on most areas critical to manufacturing.

Tom CaulfieldKeynote: Balancing Eco-System Value
Creation and Value Capture

Thomas Caulfield, Ph.D., DES (biography)
Sr. Vice President and General Manager


Frances RossKeynote: A Dynamic View of Nanostructure Growth

Frances M. Ross, Ph.D. (biography)
Research Staff Member Nanoscale Materials Analysis Department

T.J. Watson Research Center, IBM Corporation

Keynote: The Semiconductor Industry at an Economic Crossroads

Robert Maire (biography)
Semiconductor Advisors

Paul McEuenThe Science, Technology and Art of Graphene

Prof. Paul L. McEuen (biography)
John A. Newman Professor of Physical Science, Director, LAASP and Kavli Institute at Cornell for Nanoscale Science, Department of Physics
Cornell University

Gurtej SandhuEmerging Memories Technology Landscape

Gurtej S. Sandhu, Ph.D. (biography)
Senior Fellow, IEEE Fellow, Director, Advanced Technology Development, Process R&D

Micron Technology, Inc.

Panel Discussion: 

Semiconductor Manufacturing: Keeping the Silicon Magic Alive

Any sufficiently advanced technology is indistinguishable from magic.” Arthur C. Clarke

Since its inception, the semiconductor industry has changed the way we live, work and play.  Our industry has fueled innovations that touch almost every device we use today, in a way that can seem as if our devices run on magic.  Those innovations were enabled by the almost-unimaginable creativity and hard work of those of us in the semiconductor industry, and in academia, driven by the economic support provided by manufacturing profits, venture capital investments, and government-funded programs.   While it seems that the trajectory towards smaller, faster, cheaper will continue indefinitely, the challenges posed today by technical showstoppers, lack of critical investments, and failure to nurture a curious, well-educated workforce might cause the semiconductor industry to falter.  How can industry, in concert with academia and government, keep silicon magic alive? Panelists from DARPA, GE Global Research, Lam Research and Rochester Institute of Technology will discuss how semiconductors have and will continue to have a critical role in the future of innovation.

Moderator: Paul Werbaneth, Contributing Editor, 3D InCites

  • Kerry Bernstein, Program Manager, DARPA
  • Danielle Merfeld, Ph.D., Global Technology Director, Electrical Technologies & Systems, GE Global Research
  • Jeffrey Marks, Ph.D., Vice President of Advanced Technology, Lam Research 
  • Lynn Fuller, Ph.D., Professor Electrical and Microelectronic Engineering, Rochester Institute of Technology 
  • Robert Maire, President, Semiconductor Advisors

Technical Sessions:

• 3D/TSV/Interposer 
• Advanced Equipment and Materials
• Advanced Metrology 
• Advanced Patterning/Design for Manufacturing
• Advanced Process Control (APC)
• Contamination Free Manufacturing (CFM)
• Defect Inspection and Reduction
• Enabling Technologies and Innovative Devices
• Equipment Reliability and Productivity Enhancements
• Fab Optimization
• Yield Enhancement/Learning
• Yield Methodologies

• And the ever popular Interactive Poster/Reception

Who Attends ASMC?

  • IC Manufacturers
  • Equipment Manufacturers
  • Materials Suppliers
  • Chief Technology Officers
  • Operations Managers
  • Process Engineers
  • Product Managers
  • Academia...

...from across the global semiconductor supply chain.  If you didn't attend ASMC 2015, learn what you missed!

ASMC 2014 Best Paper Award, sponsored by Entegris
"Assessment of minority-alloy component segregation (e.g. Mn , Al) in back end of line copper trench structures using Kelvin probe technique"

Joyeeta Nag, Kriteshwar K Kohli, Andrew H Simon, Siddarth A Krishnan, Christopher Parks, IBM Corporation; Shishir Ray, Felipe Tijiwa-Birk, GLOBALFOUNDRIES

ASMC 2014 Best Student Paper Award, sponsored by GLOBALFOUNDRIES
"Mueller Matrix Optical Scatterometry of Si Fins Patterned using Directed Self-Assembly Block Copolymer Line Arrays"

Dhairya J. Dixit, Alain Diebold, Manasa Medikonda,College of Nanoscale Science & Engineering; Brennan Peterson, Joe Race, Nanometrics 

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ASMC Committee

SEMI thanks the ASMC committee members, who volunteer countless hours in support of our annual conference.

Author Kit

Authors presenting a technical paper at ASMC 2015, please visit the author kit for due dates, templates and additional information.

Justify Your Attendance
Use the testimonial above and our justification letter template to show why your participation ASMC 2015 will benefit you and your organization. 


Sponsorship opportunities for this event are available.  To become a sponsor, contact Marlene Sibley at msibley@semi.org or 1.408.943.6988

2015 Corporate Sponsors:

Air Liquide Logo

Applied Seals logo



Edwards Vacuum


FEI logo

GreeneTweed Logo


Lam Research

MAX I.E.G. logo

Metryx Logo



Pall logo

Valqua America

3-Way Logo

Technical/Supporting Sponsors





Mazzone logo