Session 21: Process Control
The Second Generation of Nanoscale Printing Processes and Equipment for Flexible Sensors and Electronics
Thursday, February 15, 2018
3:05 PM - 3:25 PM
This paper presents an overview of the second generation of the fully automated system for printing nanoscale sensors and electronics on large polymer substrates (up to 8 inch), higher alignment and registration resolution in the submicron range, integrated annealing and precise control of the transfer process temperature and pressure among others. The system is sued to print flexible sensors with nanoscale features and printing of 0D (nanoparticles, QDs, fullerenes, etc.), 1D (carbon nanotubes, nanowires, etc.) and 2D nanomaterials (Graphene, MoS2, black phosphorous, etc.).
Printing at the nanoscale requires understanding and overcoming a number of fundamental research barriers such as:
1. How to precisely conduct the heterogeneous printing of different nanomaterials with diversity in shape, size, composition, properties and functionalization?
2. How to printing at multiple scales from nano to micro to macro (m-scale) while ensure scalability and high yield?
3. How to integrate processes and interfaces to print multilayered 2D and 3D structures?
The second generation addresses most of these issues and is currently used to printsmart sensors, electronics, and display and storage applications. The Printing process costs 10 to 100 times less than conventional fabrication. The process is also 1000 times faster printing with a 1000 times smaller patterns than inkjet or 3D printing.
The paper will show how the new printing processes and system meets these challenges in printing organic and inorganic materials at the nanoscale. The fully automated nano and microscale printing system incorporates many of the university’s patented technologies and was funded by the Massachusetts Tech Collaborative. The tool was designed jointly by the CSSM Cluster and Milara and built by Milara, a company based in Milford, MA.
William Lincoln Smith Professor & Director
The Advanced Nanomanufacturing Cluster for Smart Sensors and Materials (CSSM), the NSF Nanoscale Science and Engineering Center for High-rate Nanomanufacturing for Northeastern University