Abstract - ASMC 2017 Tutorial - Gianluca Piazza, Carnegie Mellon

Piezoelectric MEMS 
Gianluca Piazza, Professor - Department of Electrical and Computer Engineering, Carnegie Mellon University, Pittsburgh, PA (piazza@ece.cmu.edu)

    This short course will offer an overview of the state-of-the-art in piezoelectric MEMS and present perspectives on future opportunities for microsystems enabled by these devices with a focus on radio frequency and ultrasonic applications, as well as inertial, gravimetric and infrared sensing.  The presentation will review the field of piezoelectric MEMS by highlighting the key material and device design developments, and the commercial opportunities that have driven its evolution. Specific attention will be given to aluminum nitride, as there are clear examples of successful commercialization of these devices. The established thin film bulk acoustic resonator (FBAR) and emerging laterally vibrating MEMS resonator technologies will be used as examples to convey how material synthesis, integrated fabrication processes, and device design had all converged to provide the highest performance needed to meet the needs of the wireless market. Recent trends in materials and system level integration will be discussed to convey how new applications can be addressed by emerging classes of piezoelectric MEMS. In particular heterogeneous or direct integration of piezoelectric MEMS with electronic and photonic circuits will be presented as a research thrust that could lead to new and disruptive system level applications for piezoelectric MEMS.