Silicon Run: Lithography

By Silicon Run Productions ^©1999

Running Time: 31 minutes

Format: English DVD or VHS

Click here to see DVD Trailer

This video provides in-depth look at the photolithography process in semiconductor manufacturing, and explores the unique role of lithography in imaging and printing the many layers of an integrated circuit. By looking at two specific masking processes, the video show the range of complexity from the initial less complex IC levels to the more complex levels where tight control of critical dimensions is essential. The video also highlights the chemicals and manufacturing tools needed to obtain the high resolution in today’s integrated circuits.

Topics Include:

• Fabrication Overview
• Photolithography Station
• Track System
• I-Line Stepper
• DUV Excimer Scanner

Appropriate for students and semiconductor industry professionals of all experience levels. This film is ideally suited for corporate training of new hires and non-technical personnel.

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Silicon Run II

Silicon Run Lite

Silicon Run: Deposition

Silicon Run: Etch

Silicon Run: Implantation