SEMI Standards Procedure Guide Revised

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Revised Procedure Guide: SEMI Standards Process and Practices

By Kenichiro Okuda, SEMI International Standards

July 19, 2010 Edition of Procedure Guide

In early July, the Regulations Subcommittee of ISC (International Standards Committee) approved the latest revision to the Procedure Guide* (hereafter Guide). This edition of the Guide is synchronized with the current version of the Regulations Governing SEMI Standards Committees (hereafter, Regulations) that was issued March 2, 2010. The three most significant changes to the PROCEDURE GUIDE are as follows.

Primary and Subordinate Standards

Although Subordinate Standards (e.g. SEMI E54.20-1107, STANDARD FOR SENSOR/ACTUATOR NETWORK COMMUNICATIONS FOR EtherCAT) have been developed and published for some time, there was very little documentation of the processes for them. The latest version of the Guide defines the concept of Subordinate Standards in contrast with Primary Standards (e.g. SEMI E54-1107, SENSOR/ACTUATOR NETWORK STANDARD)** and provides practical guidance for the Primary-Subordinate Standards structure. It also clarifies the limitations*** by which authors of Subordinate Standards should abide to avoid confusion.

SNARF Procedure

As introduced in the last issue of the Standards Watch, “SNARF” (Standards New Activity Report Form) was first integrated into the current version of the Regulations. Reflecting this, the current Guide significantly clarified the actual procedure for preparing, submitting and approving SNARFs. Also of importance, the current SNARF template is now included in the Guide (as APPENDIX 1), which means that any future revisions to the SNARF form will be reviewed by the Regulations Subcommittee.

Clarification on Minority Reports

The contents and details of the process of Minority Reports (hereafter, MR) have been significantly clarified. For instance, as shown in Figure 2 of the Guide, Procedural Review by the Audit & Review Subcommittee of the ISC only starts 2 weeks after the record of committee ballot adjudication for the ballot in question became publicly available, regardless of whether an MR is received by SEMI Standards staff in that period.

For More Information

The most recent version of the Procedure Guide is available here. If you have any questions about these changes or any other aspect of the SEMI Standards Program, please feel free to contact your local SEMI Standards Staff.

*(Regulations Standards Procedure Guide — A Procedure Guide that allows worldwide Program Members with different cultural backgrounds to accomplish their activities efficiently by using the same procedures and by following the examples provided.

**(PG 3.7.1) Subordinate Standards are a group of Standards relying on another Standard, which is named the Primary Standard, to state the common concepts or criteria across the group. NOTE: If only one Subordinate Standard is conceivable for a Primary Standard, it is not appropriate to apply a Primary-Subordinate Standards structure.

**(PG 3.7.3) General Rules for Subordinate Standards — It is highly recommended to construct Standards that describe a family of products, (e.g., silicon wafers, grades of chemicals), using tables or a series of similar sections in a single Standard as much as possible. This Primary-Subordinate Standards structure should only be used if there is no other way to present the information clearly or when it is necessary to address multiple similar but non-interchangeable options for a technical aspect of a product or method. NOTE: The Regulations forbid multiple similar but non-interchangeable products to be included in one Specification Standard.

Standards Watch - September 2010