MEMS Standards Committee Information
Global MEMS / NEMS Committee
To develop standards for MEMS & NEMS
devices that cannot be handled by existing technical committees. Current
topics include Wafer Bonding Alignment Targets; Step-Height
Measurements of Thin, Reflecting Films using an Optical Interferometer;
and Ultra High Purity Microscale Fluidic Systems for Use in Scalable
For more information, contact SEMI Standards at firstname.lastname@example.org.
Global MEMS / NEMS Committee Activities
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