Global MEMS / NEMS Committee
To develop standards for MEMS & NEMS devices that cannot be handled by existing technical committees. Current topics include Wafer Bonding Alignment Targets; Step-Height Measurements of Thin, Reflecting Films using an Optical Interferometer; and Ultra High Purity Microscale Fluidic Systems for Use in Scalable Process Environments.
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Global MEMS / NEMS Committee Activities
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SEMI MEMS / NEMS Standards