Korea Proposal for Equipment Cleanliness


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Korea Proposal for Equipment Cleanliness

While Korea has been actively involved in FPD Standards development over the past several years, activities are now expanding to other areas, particularly to Information & Control, EHS, and Facilities. Recently, a proposal from Korea for an Equipment Cleanliness Task Force was approved by the North American Facilities Committee during their meeting at SEMICON West in San Francisco, CA. The objective of this task force is to create a set of documents to maintain the level of cleanliness inside of process and manufacturing equipment. Internal cleanliness has always been a requirement in semiconductor equipment and will certainly become more stringent as device scale shrinks.

One of the most frequently used devices for cleanroom equipment is the Fan Filter Unit (FFU). An FFU is installed in the ceiling of the cleanroom to maintain a high level of air purity. Larger FFUs (600mm x 1200mm, 900mm x 1200mm, 1200mm x 1200mm, etc.) are installed in the ceiling of production line cleanrooms, and on a smaller scale, Equipment Fan Filter Units (EFFU) are installed in process equipment to maintain air cleanliness in confined areas. (Figure 1) However, there are no existing standards for EFFU, according to Dr Kwang Sun Kim, the leader of the Equipment Cleanliness Task Force.

Figure 1: Fan Filter Unit (FFU)

The Equipment Cleanliness Task Force will attempt to write Test Methods for Equipment Fan Filter Unit (EFFU) for six types of EFFUs in 300 mm semiconductor equipment. (Figure 2)

No.

A(mm)

B(mm)

C(mm)

1

100

200

110

2

200

200

110

3

160

300

110

4

200

400

110

5

300

600

150

6

600

600

200

Figure 2: Dimensions of Fan Filter Unit (FFU)

These documents will address unit airflow rate, static pressure, electric power requirements, and particle removal efficiency measurement for various EFFU dimensions. Using standardized test methods, users will be able to effectively provide comparable information on equipment efficiency design and manufacturing. This data will then be referenced by and integrated into relevant industry recommended practices or standards.

To join the task force or for more information, please contact Ms. Natalie Shim of SEMI Korea at eshim@semi.org.