Worldwide MEMS Systems Market Forecasted to Reach $72 Billion by 2011

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Worldwide MEMS Systems Market Forecasted to Reach
$72 Billion by 2011

New Market Research Study Identifies and Discusses Emerging MEMS Applications and Opportunities for Equipment and Materials Suppliers in the MEMS Industry

SAN JOSE, Calif. – July 16, 2007 – The market for micro-electromechanical systems (MEMS), which includes products such as automobile airbag systems, display systems and inkjet cartridges totaled $40 billion in 2006, and is expected to top $72 billion by 2011, according to Global MEMS/Microsystems Markets and Opportunities, a comprehensive new market research report from SEMI and Yole Développement.

The MEMS devices at the heart of these systems totaled $5.9 billion in 2006, and are projected to grow to $10.8 billion by 2011, with a compound annual growth rate (CAGR) of 13 percent, fueled by increasing use in consumer electronics. MEMS devices are defined as die-level components of first-level packaging, and include pressure sensors, accelerometers, gyroscopes, microphones, digital mirror displays, micro fluidic devices, etc.

The materials and equipment used to manufacture MEMS devices topped $1 billion in 2006, with MEMS materials forecasted to grow at CAGR of 13%, while MEMS equipment is forecasted to grow at a CAGR of 9% through 2011. Materials demand is driven by substrates, making up over 70% of the market, packaging coatings and increasing use of chemical mechanical planarization (CMP). While MEMS manufacturing continues to be dominated by used semiconductor equipment, there is a migration to 200 mm lines and select new tools, including etch and bonding for certain MEMS applications

Global Markets and Forecasts for MEMS Systems, Devices, Materials and Equipment




Compound Annual Growth Rate

MEMS Materials

$433 million

$806 million


MEMS Equipment

$646 million

$999 million


MEMS Devices

$5.9 billion

$10.8 billion


MEMS Systems

$40 billion

$72 billion


Source: Yole Développement

“MEMS is proving to be a very versatile technology, replacing a number of incumbent technologies in consumer electronics. Traditional MEMS devices are also finding an increasingly broad implementation in consumer applications. Much of this high volume demand is being served by foundries, increasingly on 8-inch wafers,” said Lubab Sheet, senior director of Emerging Technologies at SEMI. “However, there are still some manufacturing challenges such as stiction and packaging, both of which create opportunities for equipment and materials suppliers.”

The report details current and future applications and technology trends for MEMS devices, and provides in depth information and forecasts for the global MEMS materials, equipment, devices and systems markets. This year’s report contains new sections on Emerging MEMS Devices (micro fuel cells, micro motors, energy harvesting devices and others) and Anti-stiction, as well as expanded coverage on MEMS-CMOS Integration. Covering MEMS applications, new trends, growing markets and opportunities, the 58-page report contains 57 quality tables/graphs, plus detailed facts and figures based on 57 in-depth interviews conducted with MEMS device manufacturers, equipment and materials suppliers around the world.

The report was created by Yole Développement in cooperation with and support from SEMI. A presentation highlighting key report findings will be made by Jean-Christophe Eloy, founder and managing director of Yole Développement on Wednesday, July 18, 2007 at 2:00 pm at the Emerging Technologies & Markets TechXPOT at SEMICON West 2007 in San Francisco, California.

The report is available for no additional charge to SEMI members, at, in the market information area. Members can also obtain their electronic copy of the report by calling SEMI customer service at 1.408.943.6901 or email at Non SEMI Members can purchase the report directly from Yole Développement for euro2,000. For more information, or to order the report, call Yole Développement at +33.472.83.01.80 or web at

About SEMI

SEMI is a global industry association serving companies that provide equipment, materials and services used to manufacture semiconductors, displays, nano-scaled structures, micro-electromechanical systems (MEMS) and related technologies. SEMI maintains offices in Austin, Beijing, Brussels, Hsinchu, Moscow, San Jose (Calif.), Seoul, Shanghai, Singapore, Tokyo and Washington, D.C. For more information, visit

About Yole Développement

Based in Lyon (France headquarters), Yole Développement is a market research and business development consulting company, facilitating market access for advanced technology industrial projects. Yole Développement was founded in 1998 and is now a world leader in the analysis of the MEMS markets. With more than 18 consultants, Yole Développement works with key industrial companies, R&D institutes and investors worldwide to help them to understand the market and technology trends in the MEMS field. Visit Yole online at


Scott Smith/SEMI

Tel.: 408.943.7957