Worldwide MEMS Systems Market Forecasted to Reach $95 Billion By 2010

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Worldwide MEMS Systems Market Forecasted to Reach $95 Billion By 2010

New Market Research Study Identifies and Discusses Emerging Markets and Opportunities for the MEMS Industry

SAN JOSE, Calif. – October 10, 2006 – The market for micro-electromechanical systems (MEMS), which includes products such as automobile airbag systems, display systems and inkjet cartridges totaled $48 billion in 2005, and is expected to top $95 billion by 2010, according to Global MEMS/Microsystems Markets and Opportunities, a comprehensive new market research report from SEMI.

The MEMS devices at the heart of these systems totaled $5.3 billion in 2005, and are projected to grow to $9.9 billion by 2010, with a compound annual growth rate (CAGR) of 13 percent, fueled by increasing use in consumer electronics. MEMS devices are defined as die-level components of first-level packaging, and include pressure sensors, accelerometers, gyroscopes, microphones, digital mirror displays, micro fluidic devices, etc. The materials and equipment used to manufacture MEMS devices topped $1 billion in 2005, with MEMS materials forecasted to grow at CAGR of 15%, while MEMS equipment is forecasted to grow at a CAGR of 6% through 2010. Materials demand is driven by substrates, making up over 70% of the market, packaging coatings and increasing use of chemical mechanical planarization (CMP). While MEMS manufacturing continues to be dominated by used semiconductor equipment, there is a migration to 200 mm lines and select new tools, including etch and bonding for certain MEMS applications

Global Markets and Forecasts for MEMS Devices, Materials, and Equipment




Compound Annual Growth Rate

MEMS Materials

$385 million

$771 million


MEMS Equipment


$861 million


MEMS Devices

$5.3 billion

$9.9 billion


MEMS Systems

$48 billion

$95 billion


Source: Yole Développement

“The MEMS industry is being driven by a range of new applications in the consumer sector such as MEMS microphones in cell phones, accelerometers in consumer gaming applications, optical MEMS for TVs, MEMS resonators in lieu of quartz oscillators for time keeping, and in the coming years, micro fuel cells,” said Lubab Sheet, senior director of Emerging Technologies at SEMI. “The report takes a closer look at these application trends and implications to materials and manufacturing to enable SEMI members to better determine where the new opportunities are, and how they might fit into the market.”

The report details current and future MEMS device applications and technology trends, and provides in depth information and forecasts for the global MEMS materials, equipment, devices and systems markets. Additional report findings will be provided during a SEMI Member Webcast on October 23, 2006 at 10:00 am pacific time, featuring Jean-Christophe Eloy, founder and general manager of Yole Développement. To register for the Webcast, visit

The report was created by Yole Développement in cooperation with and support from SEMI, and is available free to SEMI members, by calling SEMI customer service at 1.408.943.6901 or email at Covering global industry segmentation, new trends and applications, growing markets and opportunities, the 44-page report contains 40 quality tables/graphs, plus detailed facts and figures based on 65 in-depth interviews conducted with companies around the world. Interviews were conducted with MEMS device manufacturers, equipment and materials suppliers. Non SEMI Members can purchase the report directly from Yole Développement for euro2,000. For more information, or to order the report, call Yole Développement at +33.472.83.01.80 or web at

About SEMI

SEMI is a global industry association serving companies that provide equipment, materials and services used to manufacture semiconductors, displays, nano-scaled structures, micro-electromechanical systems (MEMS) and related technologies. SEMI maintains offices in Austin, Beijing, Brussels, Hsinchu, Moscow, San Jose (Calif.), Seoul, Shanghai, Singapore, Tokyo and Washington, D.C. For more information, visit

About Yole Développement

Based in Lyon (France headquarters), Yole Développement is a market research and business development consulting company, facilitating market access for advanced technology industrial projects. Yole Développement is the world leader in the analysis of the MEMS markets: with more than 18 consultants, Yole Développement is working worldwide with the key industrial companies, R&D institutes and investors in order to help them to understand the markets and technology trends in the MEMS fields.


Scott Smith/SEMI
Tel.: 408.943.7957