Three Factory Automation Software Standards to be Withdrawn


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Three Factory Automation Software Standards to be Withdrawn

During its spring meeting, the North America Information & Control Committee (NA I&CC) authorized the issuance of technical ballots to withdraw three of its standards – SEMI E37.2, SEMI E58, and SEMI E58.1.

  • SEMI E37.2 - High-Speed SECS Message Services General Session (HSMS-GS)
  • SEMI E58 - Automated Reliability, Availability, and Maintainability Standard (ARAMS): Concepts, Behavior, and Services
  • SEMI E58.1 - SECS-II Protocol for Automated Reliability, Availability, and Maintainability Standard (ARAMS): Concepts, Behavior, and Services

In this meeting, held April 2, 2009 in Milpitas, California, the NA I&C committee voted to withdraw these standards because they believe that these documents are no longer being used and never came into widespread use in the industry.

In accordance with the SEMI Standards Regulations, technical committees are required to review Standards that have been published for five years without technical revisions and then determine whether these documents should be reapproved without change, revised, or withdrawn.

For SEMI E37.2, E58, and E58.1, the withdrawal ballots will be issued during the Cycle 4 voting period, which begins June 1, 2009 and ends July 1.

  • Ballot 4750
    Withdrawal for SEMI E37.2-95
  • Ballot 4751
    Withdrawals for SEMI E58-0703 and SEMI E58.1-0697

During this period, SEMI Standards voting members may cast their votes to either approve or reject the withdrawal of these documents. If a withdrawal ballot passes, the SEMI Standard will be withdrawn from publication and will no longer be available. If a withdrawal ballot fails, the responsible committee will determine the next course of action based on the voting results received.

Jack Ghiselli, co-chairman of the NA I&C Committee, looks back at the history of E37.2, E58, and E58.1:

“E37.2 was created as part of the Cluster Tool Module Communication (CTMC) suite. Although an interesting idea, CTMC did not catch on in the industry, and most of its other standards have already been withdrawn. By contrast E37.1, a slightly different standard, remains widely used throughout the industry, and has been re-approved.”

“E58 and E58.1 represent an attempt to automate collection of data needed by E10 Reliability, Availability, and Maintainability. Although another interesting idea, it was found that this approach did not provide reliable data.”

Ballots 4750 and 4751 will be officially adjudicated at the next NA I&C committee meeting on July 15 at SEMICON West 2009 in San Francisco, California.

For any questions or issues concerning ballots 4750 and 4751, please contact Paul Trio (ptrio@semi.org) at SEMI.

For more information about the upcoming Standards meetings at SEMICON West, please visit:

http://www.semi.org/en/Standards/CTR_029396

Additional information on the NA I&C withdrawal ballots:

Draft Document 4750
Withdrawal for SEMI E37.2, High-Speed SECS Message Services General Session (HSMS-GS)

Purpose of SEMI E37.2:
HSMS-GS is intended to support the needs of complex systems containing multiple independently accessible subsystems such as cluster tools or track systems. Specifically, procedures are defined to permit access to any individual subsystem or set of subsystems within any complex system.

Scope of SEMI E37.2
High-Speed SECS Message Services General Session (HSMS-GS) is a subsidiary standard to High-Speed SECS Message Services (HSMS) Generic Services.

Document 4751
Withdrawals for SEMI E58-0703 and SEMI E58.1-0697

SEMI E58
Automated Reliability, Availability, and Maintainability Standard (ARAMS): Concepts, Behavior, and Services

Purpose of SEMI E58:
This document provides standards for implementing and collecting SEMI E10 state changes at the equipment level per SEMI E10.

SEMI E10 defines various terms and equipment states but was not written specifically for application by automated equipment. This document is intended to provide a consistent interpretation of these equipment states through formal state model methodology.

ARAMS defines concepts, behavior, and message services to support the integration of automated systems within a semiconductor factory.

Scope of SEMI E58:
This standard is applicable to the following relationships: traditional host/equipment, operator/equipment, and cluster tool controller/attached module. The scope of this document is to define standards which facilitate equipment-level capture and communication of SEMI E10 related data. Specifically, this document provides the following:

  • An equipment state model that defines the rules for equipment state changes,
  • A set of standard equipment codes for representing substates of the six basic equipment states defined in SEMI E10,
  • Definition of equipment-generated data,
  • Concepts and messages required to exchange information, and
  • Requirements for fundamental compliance to ARAMS
  • Additional optional specifications.

This standard is intended as a supplement to SEMI E10 to be used for equipment support of SEMI E10. Formal definitions of all terms common to both documents are provided solely by SEMI E10.

SEMI E58.1
SECS-II Protocol for Automated Reliability, Availability, and Maintainability Standard (ARAMS): Concepts, Behavior, and Services

Purpose of SEMI E58.1
This document maps the services and data of the Automated Reliability, Availability, and Maintainability Standard (ARAMS) to SECS-II streams and functions and data definitions.

Scope of SEMI E58.1
This document applies to all implementations of ARAMS that use the SECS-II message protocol (SEMI E5).