SEMI/IEEE Advanced Semiconductor Manufacturing Conference (ASMC 2009)

The 20th Annual IEEE/SEMI®
Advanced Semiconductor Manufacturing Conference

originally scheduled for 11-13 May in Berlin, Germany has been cancelled

After careful consideration and with much regret, the ASMC committee has decided to cancel this year's ASMC. Plans were well under way, but due to low attendance projections and the stress of the economy on members, we believe the decision to cancel this year and focus on ASMC 2010 is the most responsible and prudent decision. Continuing the conference with significantly lower than normal attendance would be a disservice to the authors and sponsors. With the industry struggling, we concluded that challenges faced by manufacturers demand their full attention.

We will continue with plans to publish the ASMC 2009 proceedings and offer these for sale to industry members. Plans are also underway to allow authors who were scheduled to present at ASMC 2009 the opportunity to present their work to a broader audience through an on-line forum. Details will be provided as soon as possible.

The ASMC Committee in coordination with ISSM International will shift its focus on a combined ASMC-ISSM conference in 2010. A call for papers will be announced in July 2009.

In the meantime, please look for information on the ASMC 2009 proceedings, as well as how to participate in an ASMC 2009 forum online.

ASMC 2009 Brochure:

ASMC 2009 proceedings will include technical papers in the following areas:

  • Session 1: Defect Inspection I
  • Session 2: Advanced Equipment Processes and Materials
  • Session 3: Defect Inspection II
  • Session 4: Cost Effectiveness and Manufacturing Efficiency
  • Session 5: Lithography Advances and DFM
  • Session 6: Factory Automation and Dynamics / Industrial Engineering
  • Session 7: Interactive session
  • Session 8: Virtual Metrology
  • Session 9: Contamination Free Manufacturing
  • Session 10: Advanced Metrology
  • Session 11: Yield Learning
  • Session 12: Advanced Process Control
  • Session 13: Yield Methodologies
  • Session 14: Best of ISSM

The ASMC 2008 Best Student Paper, sponsored by ISMI, is awarded to Asser Fayed, Cypress Semiconductor, who together with Charles M. Weber, Portland State University-ETM presented “Optimizing the Operating Curve: How Can Every Fab Maximize its Performance?

The ASMC 2008 Best Paper Award, sponsored by Entegris, is awarded to Scott Jansen, IBM Microelectronic; and Glenn Florence and Alexa Perry, KLA-Tencor for their paper on “Utilizing Design Layout Information to Improve Efficiency of SEM Defect Review Sampling”.


Contact Us

For further conference information and details about sponsorship opportunities, please contact Margaret Kindling, SEMI senior program manager,, or call To order the CD-ROM of the ASMC 2008 technical proceedings, please contact SEMI customer service at 1.408.943.6901.


Our special appreciation to the ASMC committee members who have volunteered their time in support of ASMC. Please click here for a complete list of committee members.

ASMC 2008

If you did not attend 2008 ASMC look what you missed!