eustandards2005 Energy Conservation Ideas Workshop

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SEMI Workshop on Energy Conservation Ideas

Device Manufacturers, Equipment Manufacturers, Sub-Systems & Component Suppliers: “Are you ready for SEMI Standard S23 & ITRS Energy Reduction Target?”

The WSC (World Semiconductor Council) and ITRS (International Technology Roadmap for Semiconductors) calls for 20 to 40% reduction in energy consumption in the near term. The main industry players have started to incorporate “Energy Conservation” into their corporate policies and are now adopting SEMI Standards S23 (Guide for Conservation of Energy, Utilities and Materials Used by Semiconductor Manufacturing Equipment).

SEMI S23 is now becoming a purchase requirement for most device makers worldwide. S23 calls for the quantification of energy, utilities & materials consumption, as well as measurement, monitoring together with ongoing target settings for improvements.

  • Are you familiar with S23 and how it may affect your company’s future?
  • Are you prepared for the future challenges & opportunities related to S23?
  • Are your products “energy efficient” and how can you improve them?
  • What is the current “state of the art” and what solutions are available to improve energy efficiency?

Many existing ideas and solutions could be collected, shared & used to enable our industry as a whole to meet the above challenges. In response to this, an “International Energy Conservation Initiatives” taskforce was set-up to start identifying, collecting and documenting all “energy conservation initiatives” existing in our industry, with a view to preparing a white paper for July 2006.


SEMI Europe would like to invite all members from the Semiconductor community to a truly interactive workshop by stimulating and generating ideas for energy conservation relating to device makers, equipment manufacturers, sub-systems & component suppliers.

The workshop will be organised in 3 sessions:

  • Semiconductor manufacturing plants & facilities suppliers (session chaired by Patrick Dunne, Intel)
  • Semiconductor manufacturing equipment (session chaired by Bert Planting, ASML)
  • Sub-systems & components suppliers (session chaired by Dominic Potter, SMC Europe)

Each session will be chaired by an industry specialist as follows:

  • Overview of the current ideas relating to energy conservation
  • Concrete examples of Energy conservation by guest speaker
  • Active round-table discussion on experience and examples


Welcome and Background for the Workshop

Dominic Potter, workshop chairman

SMC Europe


SEMI Standard S23 (Guide for Conservation of Energy, Utilities and Materials Used by Semiconductor Manufacturing Equipment)

Jacques Engles

Applied Materials


Implementation of Combined Power and Heat Generation in Semiconductor Fabs

Patrick Colin



(TBC) ITRS Energy Reduction Target Influence on Vacuum and Gas Abatement Equipment Design

Thierry Vie

BOC Edwards


Electronics Cooling: Real-Life Cases from ASML

Edwin Renders



Implementation of Combined Power and Heat Generation in Semiconductor Fabs

Michael Aust



  • Senior design managers for Equipment, sub-suppliers & components manufacturers.
  • EHS & facilities managers with responsibilities for energy conservation.

WHEN & WHERE: 25 October 2005 from 14:00-18:30 (followed by a dinner). Faculty Club of Leuven, Belgium. The event is held in conjunction with the SEMI Europe Standards Autumn Conference and Meeting.


  • Facilities Standards technical committee meeting (free) – 25 October from 09:00-12:30
  • Energy Conservation Ideas Workshop – 25 October from 14:00-18:30
  • SEMI S2 and Standards Safety Guidelines Seminar – 26 October from 08:30-13:30
  • EH&S Standards technical committee meeting (free) – 26 October from 14:30-18:00


  • Interested in receiving a free PDF copy of SEMI Standards S23 (for evaluation purposes)?
  • Interested in an electronic copy of the proceedings of the Energy Conservation Workshop held at SEMICON Europa April 2005?

Contact Carlos Lee at

The Energy Conservation Workshop and the International Energy Conservation Initiatives Task Force are supported by the European Semiconductor Industry Association (EECA-ESIA)