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By Kevin Nguyen, SEMI

 

SEMI S2, initially developed in 1991, provides safety guidelines for semiconductor manufacturing equipment.  It covers various safety aspects related to equipment operated in a fab including electrical design, fire protection, seismic protection in event of an earthquake, mechanical design of the system, safety interlock systems, and so on.  SEMI S2 safety guideline is widely adopted by the semiconductor industry as the most stringent foundation for the safety standard.

As device technology nodes continue to shrink, semiconductor processing equipment is becoming more complex. SEMI S2 safety guideline has correspondingly expanded its scope and continues to evolve to address the need for a safe working environment.

Recently, more emphasis is being placed on the safety aspects of pressure systems. More countries are enforcing pressure guidelines for equipment to operate in their country. Korean legislation mandates that systems operated at pressures greater than 1 MPa (10 bar) are subject to inspection and approval.  An effort to address this matter has been in progress by the S2 Korean High Pressure Gas Safety Task Force  since last year.

However, a new SEMI S2 Pressure Guidelines Task Force (TF), formed at the NA Fall Standards Meetings held on November 7, 2019, intends to add a section to SEMI S2 or expand the current mechanical in section 18 with criteria and information on pressure equipment concerns such as:

  • Design guidelines,
  • Tracking of approved parts,
  • Testing requirements (pressure test, welding),
  • Materials requirements,
  • Adding a note for specific countries with specific requirements such as witnessing, country approved components, etc.

Once this guidance is incorporated in SEMI S2, equipment suppliers and third-party evaluators will be able to provide the above documentation on SEMI S2 reports and show compliance, and end users will be able to provide these compliance reports to their government for acceptance.

Led by Bert Planting (ASML), all the major equipment suppliers, including Lam Research, Nikon, and Tokyo Electron, have joined this effort.  The TF will be meeting via teleconferences to maximize industry input.

 

Get Involved

SEMI Standards development activities take place throughout the year in all major manufacturing regions. To get involved, join the SEMI International Standards Program at: www.semi.org/standardsmembership.

For more information please visit our main Web site and current events page. If you have any questions regarding SEMI EHS Standards activities, please contact your local SEMI Standards staff.

 

Standards Watch
SEMI
www.semi.org
December 5, 2019