Seren Industrial Power Systems, Inc.

Seren IPS, Inc., is a manufacturer of Compact, Lightweight, Solid State, Microprocessor controlled (R & I Series) RF Generators as well as "AT Series" Automatic Tuners. Seren's standard products are conservatively rated for output powers of 100-30,000 Watts (continuous) and are available at fixed frequencies of 13.56 MHz, 27.12 MHz and 40.68 MHz and variable frequency ranges of 100-460 kHz and 1.7-2.1 MHz. An internal DC Switcher's reduces weight and size while allowing operation at mains powers between 94-126 VAC, 180-264 VAC & 380-480 VAC. These products are designed to meet and exceed requirements for capacitive and inductive sources utilized in Sputter, Dry Etch and Deposition processes. CE Mark & NRTL Available.