標準出版品 - SEMI

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SEMI 國際標準產品  

 2009年7月1日起，SEMI CD版本的標準產品已停售，請採購功能更為完善的SEMIViews ! 單一標準文件(PDF)下載仍開放購買。

 

 

輔助資訊  
 

AUX001-0709
Title: List of Wafer Supplier Identification Codes
Committee: SEMI Standards Staff
Cost: No Charge

AUX002-0600
Title: An Overview of Factory Automation Requirements and Design
Committee: Information & Control
Cost: No Charge

AUX004-1100
Title: SEMI S2-0200 Fire Safety Evaluation Checklist for Semiconductor Equipment Using Hazardous Production Materials
Committee: EH&S
Cost: No Charge

AUX005-1101
Title: Comparison Matrix Between SEMI S2-93A and S2-0200
Committee: EH&S
Cost: As per Individual Standard

AUX007-0401
Title: Comparison between SEMI S2-93A and KOSHA S Mark
Committee: EH&S
Cost: No Charge

AUX010-0304
Title: User Interface Configurations For 300 mm Equipment Load Ports
Committee: Physical Interfaces & Carriers
Cost: No Charge

AUX013-0705
Title: 300 mm Equipment Supplier's Basic Operational Scenarios for Automation
Committee: Information & Control
Cost: No Charge

AUX014-0306
Title: List of Jig Supplier Identification Codes
Committee: SEMI Standards Staff
Cost: No Charge

AUX015-1106
Title: SEMI OCR Character Outlines
Committee: Silicon Wafer
Cost: No Charge

AUX016-0710E
Title: List of Carrier Maker Identification Codes
Committee: SEMI Standards Staff
Cost: No Charge

AUX017-0310E
Title: Contactless Carrier-Lifetime Measurement in Silicon Wafer, Ingots, and Blocks
Committee: Photovoltaic
Cost: No Charge

AUX018-0710
Title: FOUP/Load Port Interoperability Report
Committee: Physical Interfaces & Carriers
Cost: No Charge